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Adhesion effects in nanoimprint lithography

Sotomayor Torres, C.M.; Zankovych, S.; Seekamp, J.; Schulz, H.; Roos, N.; Scheer, H.C.; Pfeiffer, K....
1st International Conference on Nanoimprint and Nanoprint Technology, NNT'022002

Lift-Off process for nanoimprint lithography

Carlberg, P.; Graczyk, M.; Sarwe, E.L.; Maximov, I.; Beck, M.; Montelius, L.; Sotomayor Torres, C.M....
1st International Conference on Nanoimprint and Nanoprint Technology, NNT'022002

Nanoimprint lithography for organic electronics

Vertaisarvioitu
DOI
10.1016/S0167-9317(02)00505-1
Cedeño, C. Clavijo; Seekamp, J.; Kam, A.P.; Hoffmann, T.; Zankovych, S.; Sotomayor Torres, C.M.; Men...
Microelectronic Engineering2002

Development and characterization of resist for low temperature nanoimprint lithography

Reuther, F.; Fink, M.; Grueztner, G.; Pfeiffer, K.; Seekamp, J.; Zankovych, S.; Sotomayor Torres, C....
1st International Conference on Nanoimprint and Nanoprint Technology, NNT'022002

Nanoimprint lithography: An alternative nanofabrication approach

Vertaisarvioitu
DOI
10.1016/S0928-4931(02)00221-7
Sotomayor Torres, C.M.; Zankovych, S.; Seekamp, J.; Kam, A. P.; Cedeño, C. Clavijo; Hoffmann, T.; Ah...
Materials Science and Engineering C: Materials for Biological Applications2003

Fluorecence microscopy as a new method for quality control in nanoimprint lithography

Beck, M.; Carlberg, P.; Maximov, I.; Sarwe, E.L.; Montelius, L.; Mayer, C.; Finder, C.; Seekamp, J.;...
1st International Conference on Nanoimprint and Nanoprint Technology, NNT'022002

The use of automatic demolding in nanoimprint lithography processes

Vertaisarvioitu
DOI
10.1016/j.mee.2007.01.023
Merino, S.; Schift, H.; Retolaza, A.; Haatainen, Tomi
Microelectronic Engineering2007

Fluorescence microscopy for quality control in nanoimprint lithography

Vertaisarvioitu
DOI
10.1016/S0167-9317(03)00123-0
Finder, Ch.; Zankovych, S.; Maximov, I; Reuther, F.; Sarwe, E.L.; Seekamp, J.; Pfeiffer, K.; Carlber...
Microelectronic Engineering2003

Flexible stamp for nanoimprint lithography

Vertaisarvioitu
DOI
10.1109/MEMSYS.2005.1453978
Nielsen, T.; Pedersen, R.H.; Hansen, O.; Haatainen, Tomi; Tolkki, Antti; Ahopelto, Jouni; Kristensen...
IEEE Institute of Electrical and Electronic Engineers2005

Nanoimprint devices fabricated using nanoimprint lithography

Vertaisarvioitu
Niemi, Tapio
Finnish-Russian Photonics and Laser Symposium PALS2011

Adhesion effects in nanoimprint lithography

2002

Lift-Off process for nanoimprint lithography

2002

Nanoimprint lithography for organic electronics

Vertaisarvioitu
DOI
10.1016/S0167-9317(02)00505-1
2002

Development and characterization of resist for low temperature nanoimprint lithography

2002

Nanoimprint lithography: An alternative nanofabrication approach

Vertaisarvioitu
DOI
10.1016/S0928-4931(02)00221-7
2003

Fluorecence microscopy as a new method for quality control in nanoimprint lithography

2002

The use of automatic demolding in nanoimprint lithography processes

Vertaisarvioitu
DOI
10.1016/j.mee.2007.01.023
2007

Fluorescence microscopy for quality control in nanoimprint lithography

Vertaisarvioitu
DOI
10.1016/S0167-9317(03)00123-0
2003

Flexible stamp for nanoimprint lithography

Vertaisarvioitu
DOI
10.1109/MEMSYS.2005.1453978
2005

Nanoimprint devices fabricated using nanoimprint lithography

Vertaisarvioitu
2011